Resistivity Reference wafer of single crystal silicon material is made by using High purity polysilicon,throught  the single crystal equipment,and then using many manufacturing process such as doping by the way neutron evolution.Having the standards  which has certain hysical geometry size. Using Standard device which  the uncertainty is known to Calibrate the resistivity value and other parameters of Resistivity  Reference wafer.
 
    The Specification Requests of   Resistivity  Reference wafer.


 


 
    The size and the surface quality of  Resistivity  Reference wafer.